梳齿式微加速度计闭环系统性能的分析与优化  

Analysis and Optimization for Performance of a Multi-finger Micro-accelerometer

作　　者：吴天准[1] 董景新[1] 刘云峰[1] 赵长德[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《仪器仪表学报》2006年第3期285-289,共5页Chinese Journal of Scientific Instrument

摘　　要：为定量研究梳齿式微加速度计闭环系统的性能和参数设计准则,通过静平衡方程得到闭环系统输出公式,由此公式推导出灵敏度、最大预载、最佳预载、量程、稳定性、线性度、分辨率等公式。分析了机械和电气参数变化对性能的影响,根据性能指标提出参数的优化准则和设计公式。To carry a quantitative study on performance and designing rules for closed-loop system parameters of the multi-finger microaccelerometer, the output formula of closed-loop system is obtained through the static equilibrium equation. Basing on this, a series of formulae are deduced and proved by experiments, including expressions for scale factor ,maximum preload ,optimum preload ,input range ,stability,linearity error ,resolution, etc. The influence of changing mechanical and electrical parameters on performance is analyzed. The optimization criteria and design formulae are put forward according to demanded performance,which can give a theoretical guidance to enhance performance and optimize parameters.

关 键 词：微机电系统 梳齿式微加速度计 性能分析 量 程 稳定性 线性度 分辨率 参数设计 

分 类 号：TH824.4[机械工程—仪器科学与技术]