不锈钢管道内壁镀TiN薄膜技术及其真空性能的研究  

Studies on coating technology of inner wall of stainless steel pipe with TiN film and its vacuum characteristics

作　　者：张耀锋[1] 王勇[1] 尉伟[1] 王建平[1] 范乐[1] 蒋道满[1] 

机构地区：[1]中国科学技术大学国家同步辐射实验室,合肥230029

出　　处：《核技术》2006年第3期161-164,共4页Nuclear Techniques

基　　金：国家自然科学基金(10245002)资助项目

摘　　要：介绍了对不锈钢管道大面积内壁用直流溅射方法镀TiN薄膜的技术及工艺,并分析了薄膜的相关参数,测试了镀膜管道的真空性能。结果表明,该方法能够快速、高效地在管道内壁镀上高质量的TiN薄膜,且镀膜后真空室表面的放气率明显低于原不锈钢材料的放气率。The coating technology of inner wall of stainless steel pipe with TiN film by DC sputtering is presented in detail in this paper. The corresponding parameters of the coating process are described and the vacuum characteristics of the coated pipe are determined. Very low outgassing rate shows that DC sputtering can be used to coat stainless steel pipe with TiN film rapidly and effectively, and that the coating technique is a new and effective way for surface treatments of vacuum chambers of some accelerators.

关 键 词：TIN薄膜 直流溅射 放气率 

分 类 号：TN305.92[电子电信—物理电子学] TG17[金属学及工艺—金属表面处理]