半导体温度传感器研究进展综述  

Review of semiconductor temperature sensors development

作　　者：张洵[1] 靳东明[1] 刘理天[1] 

机构地区：[1]清华大学微电子所,北京100084

出　　处：《传感器与微系统》2006年第3期1-3,共3页Transducer and Microsystem Technologies

摘　　要：半导体温度传感器体积小、功耗低,且能与其他外围控制电路集成在同一芯片上,其应用领域广阔。评述了各种半导体温度传感器的基本实现方式、发展现状,总结了现有各种设计方法中的关键技术及其存在的问题和改进方向。The semiconductor temperature sensor is miniature, low power dissipation, and it can be integrated with other peripheral control circuits on the same chip, it has wide application prospects. The basic realization way and the current situation developed of different semiconductor temperature sensors is explained. The key technology and existing problem in various kinds of present design, methods and the improved direction are also summarized.

关 键 词：温度传感器 热测试 集成电路 

分 类 号：TN4[电子电信—微电子学与固体电子学]