母盘刻录中信息符成形模拟与实验研究  

Simulation and Experiment Study on Recording Mask in Mastering

作　　者：宋洁[1] 陈垦[1] 徐端颐[1] 潘龙法[1] 倪屹[1] 张启程[1] 

机构地区：[1]清华大学光盘国家工程研究中心,北京100084

出　　处：《光电子．激光》2006年第3期265-268,共4页Journal of Optoelectronics·Laser

基　　金：国家"973"重点基础研究资助项目(G19990330)

摘　　要：介绍了光刻胶的性能和反应机理,建立了光刻模型,讨论了曝光和显影对信息符的综合影响并对信息符形貌进行了仿真,着重分析刻录激光光斑能量分布对不同周期记录符的影响。以Shipley AZ-1350光刻胶和相应的显影液以及DVD母盘的生产为例,验证了仿真的正确性。The property and reaction mechanism of the photoresist was introduced. The mastering model is then built on that base we discuss the effect of exposure and develop and simulate the formation of the recording mask. The energy distribution of mastering laser is emphasized because of its effect on the different period recording mask. In our experiments,we take the Shipley AZ-1350 photoresist and developer as examples in the production of dvd read-only disk mastering,which matches the simulation.

关 键 词：母盘 抗蚀剂 曝光 显影 

分 类 号：TP333.4[自动化与计算机技术—计算机系统结构]