量子电容谱测试系统研制  

The Designation of Quantum Capacitance Spectrometer

作　　者：诸君浩[1] 刘坤[1] 郭少令[1] 汤定元[1] 

机构地区：[1]中国科学院上海技术物理研究所红外物理国家实验室

出　　处：《仪器仪表学报》1996年第3期225-230,共6页Chinese Journal of Scientific Instrument

摘　　要：采用差分电桥，超导磁体和双氦池等技术研制成功高灵敏的量子电容谱测试系统，系统灵敏度高达０．００１ＰＦ，系统信噪比在测试频率大于１００Ｈｚ、被测信号为１０ＰＦ时高达１５０。By using the techniques of differential capacitance bridge,superconductor magnet and double helium pots, a quantum capacitance spectrometer with a high sensitivity up to 0. 001pF has been established. The SNR of the system reaches 150 at the frequencies larger than 100Hz as the measured capacitor is 10pF. A lot of measurements have been performed for different semiconductor devices.

关 键 词：量子电容谱 测试系统 灵敏度 

分 类 号：TB939[一般工业技术—计量学]