高精度压力膜片光学测量系统设计  

Design of High Resolution Pressure-sensitive Diaphragm Optical Measurement System

作　　者：王勇[1] 鲍俊峰[1] 施勇翔 

机构地区：[1]浙江大学现代光学仪器国家重点实验室,浙江杭州310027 [2]浙江三花通产实业有限公司,浙江新昌312500

出　　处：《仪表技术与传感器》2006年第1期54-55,共2页Instrument Technique and Sensor

摘　　要：介绍了利用高精度激光位移传感器为主要探测元件,结合高精度伺服机构、精密X-Y平台、伺服控制卡和信号采集卡开发的汽车传感器压力开关膜片测试系统。系统主要实现压力位移测试和膜片表面形状精确测试两项功能。应用高速采样板卡和双缓存数据读取机制,实现了压力位移数据实时采集;高精度伺服机构和自动定位扫描算法相结合,提高了扫描平面分辨率。系统通过高性能测试元器件和合理的软件设计,实现了膜片压力位移曲线和表面形状的精确测量,为压力开关的设计和分析提供科学的检测手段。Pressure-sensitive diaphragm measurement system based on single-point laser optical triangulation was described, which was combined with high resolution serve motor ＆ drive, precision X - Y plant, serve control card and data acquisition card. The pressure and distance real-time measurements were realized by using high speed data collection board and dual-buffle data read scheme. High resolution serve motor system and automative location determination algorithm specially designed for this application increased the measurement spatial accuracy of the diaphragm on the plane scanned. The surface shape of diaphragm and the relation between the shape variation of diaphragm and pressure can be measured in high precision with this system, which was a combination of high quality measurement units and reasonable software design.

关 键 词：激光三角法 伺服电机控制 信号采集 膜片测量系统 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]