Performance analysis on captive silicon micro-accelerometer system  

电容式硅微加速度计系统的性能分析(英文)

作　　者：吉训生[1] 王寿荣[1] 许宜申[1] 盛平[1] 

机构地区：[1]东南大学仪器科学与工程系

出　　处：《Journal of Southeast University(English Edition)》2006年第1期69-72,共4页东南大学学报（英文版）

摘　　要：The operational principle and the lumped parameters model of capacitive micro-accelerometer are introduced. The equivalent stiffness of different directions of the accelerometer is given. From the point of view of energy and mechanics, expressions of some key parameters, such as the damping, sensitivity, resolution of the accelerometer, are derived. The accelerometer noise behavior of mechanical-thermal noise in the open-loop system, along with the dynamic range of the open-loop system and closed-loop system is analyzed. The result is that the noise of the capacitive micro accelerometer is dominated by the magnitude of mechanical-thermal noise. At the same time, the magnitude of mechanical-thermal noise depends on the temperature and magnitude of mechanical damp. The result of the measurement from the implemented closed-loop microo-accelerometer system shows that the resolution is the level of rag, and the measurement range is from -50g to 50g.介绍了微加速度计的工作原理,得出了不同方向上的加速度计的等效刚度.基于加速度计的集总模型分析,从能量和运动角度推导得出了加速度计的等效质量、精度和灵敏度的具体表达形式.从力学观点,总结了加速度计阻尼的影响因素.对开环和闭环加速度计系统的机械热噪声的特性和它们各自检测的动态范围进行研究后发现,电容式微加速度计的噪声主要由机械热噪声决定,并取决于加速度计系统的温度和阻尼.对闭环加速度计系统的测量结果表明,系统的精度可以达到mg数量级,量程为±50g的范围.

关 键 词：MICRO-ACCELEROMETER sensitivity spectral density mechanical-thermal noise DAMPING 

分 类 号：TH824.4[机械工程—仪器科学与技术]