MICRO-ACCELEROMETER

作品数：9被引量：10H指数：2
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相关领域：机械工程更多>>
相关作者：郭涛盛平吉训生许宜申李丽华更多>>
相关机构：东南大学中北大学更多>>
相关期刊：《Modern Mechanical Engineering》《Chinese Journal of Mechanical Engineering》《Journal of Southeast University(English Edition)》《Journal of Semiconductors》更多>>
相关基金：国家自然科学基金国家高技术研究发展计划更多>>
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Numerical Simulation on the Comb Drive Micro-Accelerometer
《Modern Mechanical Engineering》2017年第4期113-126,共14页Xiangyi Zhao 
In this study, we research about comb-drive micro-structure, which is a MEMS device used to measure velocities and accelerations. To ensure the accuracy and visualization of the result, we simulate the dynamics of the...
关键词：Comb-Drive MICRO-STRUCTURE COMSOL MULTIPHYSICS Optimization Electric RESPONSES 
Micro-accelerometer Based on Vertically Movable Gate Field Effect Transistor被引量：2
《Nano-Micro Letters》2015年第3期282-290,共9页Heung Seok Kang Kang-Hee Lee Dong-Youk Yang Byoung Hee You In-Hyouk Song 
supported by the National Research Foundation of Korea(NRF)funded by the Korea government(MSIP)(No.2012M2A8A5025825)
A vertically movable gate field effect transistor(VMGFET) is proposed and demonstrated for a microaccelerometer application. The VMGFET using air gap as an insulator layer allows the gate to move on the substrate vert...
关键词：MEMS MICRO-ACCELEROMETER Suspended gate FET Vertically movable gate FET VMGFET 
Wireless sensor network based on CC2530被引量：1
《Journal of Measurement Science and Instrumentation》2013年第3期286-288,共3页郭涛 闫明明 鲍爱达 
National Natural Science Foundation of China(No.51075374)
This paper designs a wireless sensor network based on CC2530.The sensor nodes consist of multi-ranged accelerometer and CC2530,covering all the ranges of the acceleration signals which can be measured.The designed sys...
关键词：multi-ranged micro-accelerometer ACCELERATION wireless sensor networkCLC number：TN926 Document code：AArticle ID：1674-8042（2013）03-0286-03 
Noise analysis and characterization of a full differential CMOS interface circuit for capacitive closed-loop micro-accelerometer
《Journal of Harbin Institute of Technology(New Series)》2010年第5期684-689,共6页刘晓为 李海涛 尹亮 陈伟平 索春光 周治平 
Sponsored by the National High Technology Research and Development Program of China(863Program)(Grant No.2008AA042201)
To achieve a high precision capacitive closed-loop micro-accelerometer,a full differential CMOS based on switched-capacitor circuit was presented in this paper as the sensor interface circuit.This circuit consists of ...
关键词：low noise full differential SWITCHED-CAPACITOR CLOSED-LOOP capacitive micro-accelerometer 
Analysis and Prevention for Oscillation Failure of Capacitive Micro-accelerometers被引量：2
《Chinese Journal of Mechanical Engineering》2010年第3期336-345,共10页WAN Caixin DONG Jingxin HAN Fengtian 
supported by National Key Technologies R&D Program of China during the 11th Five-Year Plan (Grant No. 51309050208)
As actuator of the force-rebalanced servo loop, the electrostatic force generator of the micro-accelerometer shows high nonlinearity while the interpole of the micro-electro-mechanical system（MEMS） sensor is far awa...
关键词：variable structure systems micro-electro-mechanical system acceleration measurement oscillation failure 
Research of handwriting detecting system for space pen
《Natural Science》2010年第1期56-62,共7页Zong-Yu Gao De-Sheng Li Wei Wang Chun-Jie Yang 
A handwriting detecting system based on Micro- accelerometer and Micro-gyros is proposed. And the algorithm of the detecting system is also described in detail. And the error analysis of the detecting system is also d...
关键词：HANDWRITING Detecting Micro-Gyro MICRO-ACCELEROMETER 
A novel capacitive micro-accelerometer with grid strip capacitances and sensing gap alterable capacitances
《Journal of Semiconductors》2009年第3期72-77,共6页董林玺 陈金丹 颜海霞 霍卫红 李永杰 孙玲玲 
supported by the National Natural Science Foundation of China (No. 60506015);the Zhejiang Provincial Natural ScienceFoundation of China (No.Y107105).
The comb capacitances fabricated by deep reactive ion etching （RIE） process have high aspect ratio which is usually smaller than 30 ： 1 for the complicated process factors, and the combs are usually not parallel du...
关键词：capacitive accelerometer inertial sensor high precision deep RIE 
A novel micro-accelerometer with adjustable sensitivity based on resonant tunnelling diodes被引量：5
《Chinese Physics B》2009年第3期1242-1247,共6页熊继军 毛海央 张文栋 王楷群 
supported in part by the National Natural Science Foundation of China (Grant No 50775209);the Fork Ying Tung Education Foundation (Grant No 101052);Program for Excellent Talents by Ministry of Education of China
Resonant tunnelling diodes （RTDs） have negative differential resistance effect, and the current-voltage characteristics change as a function of external stress, which is regarded as mesc-piezoresistance effect of RT...
关键词：MICRO-ACCELEROMETER piezoresistance effect resonant tunnelling diode （RTD） sensitivity 
Performance analysis on captive silicon micro-accelerometer system
《Journal of Southeast University(English Edition)》2006年第1期69-72,共4页吉训生 王寿荣 许宜申 盛平 
The operational principle and the lumped parameters model of capacitive micro-accelerometer are introduced. The equivalent stiffness of different directions of the accelerometer is given. From the point of view of ene...
关键词：MICRO-ACCELEROMETER sensitivity spectral density mechanical-thermal noise DAMPING 
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