硅悬臂梁脉象传感器温度补偿  

Temperature compensation of pulse image sensor formed on the silicon cantilever beam

作　　者：王丙利[1] 李点美[1] 王璐[1] 杨志[1] 温殿忠[1] 

机构地区：[1]黑龙江大学集成电路重点实验室,黑龙江哈尔滨150080

出　　处：《传感器与微系统》2006年第4期24-25,28,共3页Transducer and Microsystem Technologies

基　　金：黑龙江省科技计划资助项目

摘　　要：阐述了采用硅悬臂梁制造的脉象传感器结构、设计和温度补偿原理。实验结果表明：补偿后的传感器具有灵敏度高、稳定性好，线性度为1％FS（0-5N），重复性为0．5％FS，灵敏度为50mV／N。给出的温度补偿晶体管对该脉象传感器的灵敏度温度漂移补偿效果好，有推广应用前景。The temperature compensate principles, structure and design of pulse image sensor formed on the silicon cantilever beam are discussed. Experiment results show that pulse image sensor temperature compensated has high sensitivity and high stability. Linear error is 1% FS （ 0 - 5 N ）, repeat error is 0. 5 % FS and pressure sensitivity is about 50 mV/N. Temperature compensate transistor has good compensate effect to sensitivity drift of the pulse image sensor,the results apply equally to other fields.

关 键 词：悬臂梁 脉象传感器 温度补偿 稳定性 

分 类 号：TN212[电子电信—物理电子学]