用微机电系统技术制微型PEMFC及其性能研究  

Stady on the performance of μPEMFC with MEMS technology

作　　者：陈聪[1] 郑丹[2] 张熙贵[1] 杨辉[1] 夏保佳[1] 李昕欣[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术国家重点联合实验室,上海200050 [2]上海应用技术学院化学工程系,上海200235

出　　处：《电源技术》2006年第4期261-265,268,共6页Chinese Journal of Power Sources

基　　金：国家"863"项目(2003AA404120)资助

摘　　要：采用氧化、光刻、KOH湿法腐蚀和溅射等一系列微机电系统(MEMS)工艺,在n型单晶硅片衬底上制作微型质子交换膜燃料电池(mPEMFC)的精细流场,并用扫描电子显微镜(SEM)观察所形成的流场微观形貌。将加工好的流场板分别与不同的膜电极组件(MEA)叠片式组装成H2-空气自呼吸式mPEMFC。所制成的单体电池的体积约为0.3cm3,质量不足0.65g。在20℃,相对湿度RH为(60±5)%的室内环境下,用三种不同MEA即Nafion112、Nafion1135自制热压MEA和GorePrimeaR5561MEA组装成的电池,其峰值比功率、体积比功率和质量比功率分别为123、112、58mW·cm-2,410、373、193W·L-1,189.2、172.9、89.2W·kg-1。通过比较上述三种不同mPEMFC的性能,分析了影响电池性能的若干因素。用Nafion1135MEA组装的mPEMFC以50mA·cm-2进行累计260h长时间放电实验,电池电压保持在0.6V以上。A silicon-based miniature H2-air self-breathing proton exchange membrane fuel cell （μPEMFC） has been developed with its electrochemical characterization evaluated. The designed structure consists of a flowfield embedded anode and a meshed open cathode chip that allows a self-breathing operation of the fuel cell. Anode and cathode flowfields are fabricated in Si wafers using the bulk micromaching technology. MEAs prepared by hot-pressing with Nafion1135 and Nafionl 112 PEM are taken into account along with a commercially available MEA Gore Primeag5561. Three types of cells with 1 cm^2 active area are assembled by sandwiching MEAs respectively between two micro-fabricated Si wafers, and the performance of various cells are compared. The total volume of the fuel cell is 0.3 cm^3, mass less than 0.65 g. Polarization curves are measured at room temperature （20 ℃）, under natural air convection of the cathode. Stable operation is achieved at 50 mA·cm^-2 at varying ambient conditions with dry hydrogen fuel.

关 键 词：微型质子交换膜燃料电池(μPEMFC) 微机电系统(MEMS)技术 单晶硅片 

分 类 号：TM911.4[电气工程—电力电子与电力传动]