不同取向金刚石薄膜的红外椭圆偏振光谱特性研究  

STUDIES ON INFRARED SPECTROSCOPIC ELLIPSOMETRY OF DIFFERENT ORIENTED CVD DIAMOND FILMS

作　　者：苏青峰[1] 夏义本[1] 王林军[1] 刘健敏[1] 史伟民[1] 

机构地区：[1]上海大学材料科学与工程学院电子信息材料系,上海200072

出　　处：《红外与毫米波学报》2006年第2期86-89,共4页Journal of Infrared and Millimeter Waves

基　　金：国家自然科学基金(60277024);上海应用材料研究与发展基金;上海市纳米专项(0452nm051);上海市重点学科(T0101)资助项目

摘　　要：采用红外椭圆偏振光谱仪对HFCVD方法所制备的不同取向金刚石薄膜的光学参数进行了测量．结果表明（001）取向金刚石薄膜具有较佳的光学质量，在红外波段基本是透明的．在2．5-12．5μm红外波长范围内，（001）取向金刚石膜的折射率和消光系数几乎不随波长的改变而变化，折射率为2．391，消光系数在10^-5范围内；对于（111）取向金刚石膜，其折射率和消光系数随波长的改变有微小变化，折射率和消光系数都低干（001）取向膜．通过计算拟合得到（001）取向金刚石膜的介电常数为5．83，优干（111）取向膜。Optical properties of different oriented diamond films obtained by hot filament chemical vapor deposition （ HFCVD） were measured by using infrared spectroscopic ellipsometry in the wavelength range of 2.5 - 12.5 μm. The measured results indicate that （001）-oriented diamond film is optical thin-film in high quality and almost entire transparent in the whole infrared region. Refractive index and extinction coefficient of （001） -oriented diamond film are 2. 391 and in the order of 10^-5, respectively. For the （ 111 ）-oriented one, refractive index and extinction coefficient have a little variation with the wavelength change and are not as good as that of （001）-oriented one. However, the dielectric constant calculated for both films show that （001） -oriented film with a value of 5.83 is much better than that of （ 111 ） -oriented one.

关 键 词：CVD金刚石膜 红外椭圆偏振光谱 折射率 消光系数 

分 类 号：O433.4[机械工程—光学工程] TN213[理学—光学]