杂化CuPc有机半导体的气敏特性研究  

Study on Sensitive Properties of Mixed CuPc Organic Semiconductor

作　　者：李月[1] 施云波[1] 殷景华[1] 杨培滋[1] 

机构地区：[1]哈尔滨理工大学应用科学学院,黑龙江哈尔滨150080

出　　处：《哈尔滨理工大学学报》2006年第2期43-46,共4页Journal of Harbin University of Science and Technology

基　　金：国家自然科学基金资助项目(60272002);黑龙江省科技攻关项目(GC03A121)

摘　　要：采用“模板法”,在N2气保护下,合成CuPc基体材料.通过共溶技术对其杂化,得到具有较理想电导率的气敏材料.应用微精细加工工艺制备具有平面叉指电极结构的气体传感器的基片,利用真空镀膜方法在平面叉指电极基片上形成敏感膜.通过扫描电子显微(SEM)形貌分析表明,薄膜颗粒尺寸均匀.静态测试法考核传感器性能表明,传感器具有较好的响应恢复性,灵敏度和热稳定特性,对C l2、NO2、H2S等有毒气体选择性好、响应灵敏.Introducing a method of synthesizing CuPc with the protection of N2, an ideal conductivity was obtained by mixing the material of phthalocyanine properly. By meticulous processing technology, level fork electrode was prepared; by means of vacuum plat film, daubing and dip - coating technology, a sensitive membrane was formed on fork electrohde. SEM shape looks analysis indicated that the particles of the membrane were even. The experiment showed that the sensitive membrane of phthalocyanine has good responsible, sensitivity and stable properties to Cl2. NO2, H2S gas.

关 键 词：杂化CuPc 又指电极 灵敏度 敏感膜 

分 类 号：O643[理学—物理化学]