基于Labview技术的消光式椭偏测厚仪的研究与设计  

Research and Design of Light Elimination Type Ellipsometer Based on Labview Technology

作　　者：张诚[1] 王金海[1,2] 陈才和[2] 张波[1] 岳泉[1] 

机构地区：[1]天津工业大学信息与通信工程学院 [2]天津大学精密仪器与光电子工程学院,光电信息技术科学教育部重点实验室,天津300072

出　　处：《传感技术学报》2006年第2期432-435,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助项目(49974010)

摘　　要：介绍了一种基于Labview的消光式椭偏仪光学测量系统,用于进行透明薄膜厚度的精确测量。研究并推导出消光式椭偏仪光学系统的数学模型及椭偏参数的计算公式。在理论研究的基础上,基于虚拟仪器设计技术,开发了信号采集、传输电路和编写测量软件,设计了椭偏仪的自动控制测量系统。通过对SiO2薄膜的测试,验证了仪器具有良好的可靠性和重复性,薄膜厚度误差小于100,折射率误差小于0.01。The paper introduces a light elimination type ellipsometer optical system based on Labview, which can realize accurate measurement of film thickness. The mathematical model of elimination type ellipsometer optical system and the formula of elliptical parameter are researched and deduced. By theory research, the circuit of signal acquiring and transforming and the measurement soft is developed. Based on virtual instrumentation technology, automatic control measurement system of ellipsometer is designed. Through the testing of SiO2 film, it has been proved that the reliability and repetition of the instrument are favorable. The measurement error of the film thickness is less than 100 A and the measurement error of the refractivity rate is less than 0. 01.

关 键 词：椭偏仪 消光法 虚拟仪器 LABVIEW 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]