ZnMgS多晶薄膜的结构和光学性质  

Microstructures and Optical Properties of ZnMgS Polycrystalline Films

作　　者：苗银萍[1] 孙汪典[1] 朱汉明[1] 

机构地区：[1]暨南大学物理学系,广州510632

出　　处：《真空科学与技术学报》2006年第2期106-109,162,共5页Chinese Journal of Vacuum Science and Technology

摘　　要：本文介绍了对真空蒸发制备的多组ZnxMg1-xS多晶薄膜的研究,用X射线能量色散谱仪(EDS)测定几组ZnxMg1-xS薄膜样品的成分后,由原子力显微镜(AFM)和X射线衍射(XRD)测试结果表明:薄膜晶体生长形貌和结晶性良好,为闪锌矿结构;对ZnxMg1-xS薄膜的紫外吸收分析表明,薄膜在345 nm^275 nm处形成陡峭的吸收边,在波长小于275 nm的紫外区有强烈的吸收;光致发光谱中发光中心波长在可见光区紫光范围约为401 nm^395 nm之间。同时随着Mg含量的增加,样品的(111)峰位向大角度方向移动,吸收边和发光峰的蓝移也增加,蓝移说明了带隙的展宽。显示了其作为短波光电器件材料和拓展紫外发光器件的研制领域的潜力。Microstructures and optical properties of polycrystalline ZnMgS solid solution films, grown by vacuum evaporation on quartz substrates, were characterized with X-ray energy dispersion spectrocscopy （EDS）, atomic force microscopy （AFM）, X-ray diffraction （XRD） ,ultraviolet visible （UV-Vis） absorption spectroscopy and photoluminescence spectroscopy （PL）. The results show that fidrly uniform polycrystalline ZnxMg1-xS film has an 〈 111〉 orientated zinc-blende phase. Strong absorption was observed in short wavelength range and the absorption edge was found to be somewhere between 345 nm and 275 nm.PL peaks lie in 401 nm- 395 nm with no other morn temperature emission.As Mg concentration increases, （111） peak moves toward large angle,and blue shift of both the absorption edge and PL peak becomes increasingly pronounced, indicating the band-gap widening. Possible applications of the films as photo-electronic materials were also discussed.

关 键 词：真空蒸发 ZnMgS 结构和光学性质 多晶薄膜 

分 类 号：O484.1[理学—固体物理]