基于微电子系统(MEMS)加速度地震勘探三分量数字检波器简介  

A Brief Introduction to Acceleration Triaxial Digital Geophone Based on Microelectronic Mechanical System(MEMS)

作　　者：张莉 解文荣 李秀荣 

机构地区：[1]山东省煤田物探测量队,山东泰安271021

出　　处：《中国煤田地质》2006年第2期57-59,共3页Coal Geology of China

摘　　要：基于微电子机械系统(MEMS)制成的微加速度三分量数字地震检波器,集数据采集、处理及传输功能于一体,在结构模型、工作原理、性能指标控制等方面不同于常规检波器,其信号幅值在低于自然频率范围内没有衰减。因其独特的制造技术,MEMS检波器具有超低噪声,大动态范围和极高的向量保真度性能。The acceleration triaxial digital geophone based on microelectronic mechanical system （MEMS） is a geophone concentrating three functions of data gathering, processing and transferring in one. It is different from traditional geophone on aspeers of structure model, operational principle and performance indices controlling. Its signal peak value will not be attenuated when it is negative to free frequency. Since its unique manufacturing technology, the MEMS geophone has ultra-low noise, larger dynamic range and very high vectorial fidelity performances.

关 键 词：MEMS 传感器 三分量数字检波器 地震仪器 

分 类 号：P613.436[天文地球—矿床学]