气相传输平衡法在(11-20)面蓝宝石上制备γ铝酸锂膜  

Preparation of γ-LiAlO_2 Layer on(11-20)Sapphire by Vapor Transport Equilibration

作　　者：刘世良[1] 周圣明[1] 李抒智[1] 王银珍[1] 徐军[1] 

机构地区：[1]中国科学院上海光学精密机械研究所,上海201800

出　　处：《光学学报》2006年第5期773-776,共4页Acta Optica Sinica

基　　金：中国科学院2003年度"引进国外杰出人才"计划资助课题

摘　　要：为了寻找可能替代蓝宝石作为氮化镓外延的新型衬底,通过48 h的气相传输平衡,分别在1000℃、1030℃、1050℃、1070℃和1100℃制备了一层单相多晶的γ铝酸锂膜。X射线衍射和扫描电镜分别用于表征膜的物相、取向和表面形貌。结果显示,γ铝酸锂择优取向的好坏取决于气相平衡传输温度,在1050℃制备的γ铝酸锂具有高度的[100]择优取向;在γ铝酸锂(001)面上的双轴拉应力可能有助于[100]择优取向的形成;γ铝酸锂晶粒表面裂纹的方向一致性与其择优取向紧密相关。上述结果表明在合适的工艺条件下,气相传输平衡法制备的γ铝酸锂/蓝宝石可能成为一种很有前景且适合(1-100)面氮化镓生长的复合衬底。In order to find a new substrate which can probably substitute the sapphire for GaN epitaxy, a single phase and polycrystalline TLiAlO2 layer has been prepared by vapor transport equilibration （VTE） for 48 hours at 1000℃, 1030 ℃, 1050 ℃, 1070℃ and 1100 ℃, respectively. X-ray diffraction （XRD） and scanning electronic microscope （SEM） have been used to characterize the phase, orientation and surface morphology. The results show that the preferred orientation of SLiAlO2 layer depends on temperature. The 7-LiAlO2 layer prepared at 1050℃ has a highly preferred [100] orientation. A biaxial tensile stress existing in （001） γ-LiAlO2 may contribute to the form of the preferred [100] orientation. The directional coherence of stripes on the surface of γ-LiAlO2 grains closely corresponds to the preferred orientation of γ-LiAlO2 layer. The above results indicate that the γ-LiAlO2/α-Al2O3 prepared by vapor transport equilibration under appropriate conditions probably provides a promising compound substrate which adapts to grow （1-100） GaN film.

关 键 词：薄膜光学 复合衬底 气相传输平衡 γ铝酸锂 

分 类 号：O793[理学—晶体学]