AOI技术在激光微孔产品检查中的应用  

AOI in Laser Drilled Microvia Production

作　　者：高艳丽[1] 毛少昊[1] 

机构地区：[1]江南计算技术研究所,214083

出　　处：《印制电路信息》2006年第5期44-47,共4页Printed Circuit Information

摘　　要：在过去几年里,小型PCB诸如硅芯片级以及便携式移动电话的生产者和设计者们已经发现:如果要保持自己的竞争力并具备生产高密度封装板能力,就必须采用微孔技术。微孔技术的出现要求针对微孔缺陷的有效检测手段对工艺进行过程控制。本文对激光微孔的自动光学检测进行了详细介绍。Over the past few years, manufacturers and designers of small-form PCBs such as silicon platforms and cellular phones have increasingly found that microvia technology must be used if they are to remain competitive and capable of interconnecting high density packages, Microvia technology required an process control guardian to detect defects of microvia effectively.In this paper, automated optical inspection of laser microvia was detailedly introduced.

关 键 词：高密度互连 激光微孔 缺陷侦测 自动光学检测 

分 类 号：TN41[电子电信—微电子学与固体电子学] TG71[金属学及工艺—刀具与模具]