圆光栅刻划误差的自动校正  

Automatic correction for dividing errors of radial grating

作　　者：杨永才[1] 陈林[1] 孙银春 何勇胜 

机构地区：[1]华东工业大学仪器仪表学院

出　　处：《华东工业大学学报》1996年第3期85-90,共6页

摘　　要：指出了提高圆光栅刻划精度的途径，并给出刻划误差自动校正的方法．通过对误差源的分析，找出主要误差的变化规律并导出其数学表达式，利用微机控制的专门装置，使光栅在刻划时转动一个附加角度。The highprecision radial grating has been widely used as orientation standard in highprecision angular measurement instrument. This paper discusses how to increase the precision of radial grating and introduces a method which corrects the dividing error of radial grating automatically. Through analizing the dividing errors of radial grating, the variation of main error sources can be seen and its mathematical expression can be derived. Microcomputer is utilized to control a special transmission device which makes radial grating rotate an additional angle and counteract the dividing errors of the radial grating.

关 键 词：圆光栅 刻划精度 误差校正装置 光学仪器 

分 类 号：TH741.23[机械工程—光学工程]