MEMS波长可调谐激光器及其进展  

MEMS Wavelength Tunable Lasers and Progress

作　　者：罗雁横[1] 张瑞君[1] 

机构地区：[1]中国电子科技集团公司第44研究所,重庆400060

出　　处：《微纳电子技术》2006年第5期214-218,共5页Micronanoelectronic Technology

摘　　要：论述了MEMS波长可调谐激光器及其进展。介绍了几种不同类型的波长可调谐激光器,如基于表面微机械反射镜的MEMS可调谐激光器、基于深腐蚀圆形反射镜的MEMS可调谐激光器、基于闪耀光栅的MEMS可调谐激光器、基于阵列集成的MEMS可调谐DFB激光器和VCSEL基MEMS可调谐激光器。wavelength MEMS wavelength tunable lasers and its progress were preserted. Different kinds of tunable lasers were introduced, such as MEMS tunable laser based on surface-micromachined mirror, deep-etched circular mirror, blazed grating, array integration and VCSEL.

关 键 词：微电子机械系统 波长可调谐 激光器 

分 类 号：TH744.5[机械工程—光学工程]