基于能量法的微驱动器静电弹性耦合分析  

Coupling of Electrostatic-Elastic of Micro Actuator Based on Rayleigh-Ritz Energy Method

作　　者：李丽伟[1] 朱荣[1] 周兆英[1] 

机构地区：[1]清华大学,北京100084

出　　处：《微纳电子技术》2006年第5期244-246,共3页Micronanoelectronic Technology

摘　　要：以微泵静电驱动结构为例,基于静电和弹性薄板理论,应用瑞利-黎兹能量法建立了周边固支边界条件下,静电驱动圆膜弯曲振动的谐振频率及相应振型的理论模型。位移振形的模态分析及频率计算结果均表明该计算实例的谐振频率为635Hz,为微驱动器的设计及控制提供了理论依据。Based on thin plate elastic theory of electrostatic and silicon material combined with the Rayleith-Ritz method, model for the calculation of resonance frequency and shape of bending modal of micropump actuator structure were derived. The results of bending diasplacement modal analyzation and frequency calculation indicate that the resonance frequency of example is 635 Hz. All the analyzation provides theoretical foundation for the design of MEMS actuators.

关 键 词：静电驱动 薄板理论 瑞利-黎兹能量法 

分 类 号：TH703.1[机械工程—仪器科学与技术] O441.1[机械工程—精密仪器及机械]