基于隧道效应振动梁式陀螺仪自检电极设计  

Design of self-test electrode for tunneling-based gyroscope with vibrating cantilever

作　　者：王凌云[1] 陈义华[1] 孙道恒[1] 

机构地区：[1]厦门大学机电工程系,福建厦门361005

出　　处：《传感器与微系统》2006年第5期61-63,66,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(50275127);福建省自然科学基金资助项目(A0110003);福建省科技计划重点资助项目(2002H022)

摘　　要：在微机电系统内建立自检系统是提高系统运行可靠性、安全性的重要手段之一。陀螺仪中的Coriolis力和其他惯性力存在一定的差别,即使在恒定的角速度输入下,Coriolis力也是一种动态变化的力。通过一对平板电极,其中,一个平板电极的边缘按照一定的函数变化,当陀螺仪的悬臂梁振动时,其平板间的静电力的变化能很好地模拟陀螺仪中的Coriolis力,有限元分析结果也表明:应用该方法完全能实现陀螺的自检和测试。One of important way to improve the reliability and safety of MEMS is to use a built-in self-test. There are some differences between Coriolis force and other inertial force in gyroscope. The Coriolis force is dynamic, although the angular rate is constant. A pair of plate electrodes is used, the boundary of one of them changes according to a special function. When the gyroscope＇ s cantilever oscillates, the electrostatic force between the two plate electrodes can perfectly simulate the Coriolis force in qyrosoope. The result of finite element analysis（FEA） also indicates this design can be used to realize the aim of self-testing in the gyroscope.

关 键 词：遂道效应 可靠性 自检 陀螺仪 平板电极 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]