薄膜截面的TEM样品制备  

CROSS-SECTIONAL TEM SAMPLE PREPARATION OF THIN FILMS

作　　者：戴嘉维[1] 孔明[1] 

机构地区：[1]上海交通大学材料学院-Buehler公司联合实验室,上海200030

出　　处：《理化检验（物理分册）》2006年第5期239-241,共3页Physical Testing and Chemical Analysis(Part A:Physical Testing)

摘　　要：针对用于透射电镜观察的截面样品制备较为困难的问题,以不锈钢基底上沉积的VN／SiO2超晶格薄膜为例,介绍了薄膜截面TEM样品的制备方法与过程。Cross-sectional TEM observation can be used as a very useful method in the investigation of microstructure of thin films. However, the sample preparation for cross-sectional TEM observation is generally regarded as a challenging task. in this paper, we discussed the preparation of TEM cross-sectional samples in a step- by-step approach designed to enable a competent experimentalist to reproduce the technique. An example from VN/ SiO2 superlattice is discussed correspondingly.

关 键 词：薄膜 截面TEM样品制备 超晶格 

分 类 号：TG115.221.2[金属学及工艺—物理冶金]