激光位置检测中PSD的误差分析与实验研究  

The Error Analysis and Experimental Study on PSD Used in Laser Position Detection

作　　者：朱明珠[1] 陈培峰[1] 周保玉[1] 曾为[1] 

机构地区：[1]华中科技大学激光技术与工程研究院,湖北武汉430074

出　　处：《光电子技术与信息》2006年第3期10-14,共5页Optoelectronic Technology & Information

摘　　要：通过实验研究了激光光束质量对PSD输出位置精度的影响。基于PSD工作原理分析并得出了背景光强与输出结果的关系,实验中采用与测量光源匹配的滤光片来消除背景光干扰,极大提高了PSD的测量精度。并通过双一次插值算法修正PSD的非线性误差,修正后结果表明B区测量误差显著减小,线性度和测量精度明显提高。In the experiment, the effects of laser beam quality on the output position precision of the PSD are analyzed. The relationship between background light intensity and output of the PSD is analyzed based on the working theory of the PSD, the opticat filter matching up to the wavelength of the source tight is used to remove the disturbance due to the background light and the measure precision is improved. In order to improve the linearity and measure precision of B area of the PSD, duo-linear interpolation Algorithm is provided to correct the nonlinearity error. The corrected results show th.at the measure error of B area decreases greatly, the linearity and measure precision improve greatly.

关 键 词：激光检测 位置精度 位置敏感探测器 背景光 非线性 插值算法 

分 类 号：TN247[电子电信—物理电子学]