超高真空系统内Mn-Zn铁氧体材料的表面保护及清洁方法研究  

Protection/cleaning process of Mn-Zn ferrite surface inside UHV system

作　　者：张素平[1] 杨晓天[1] 张军辉[1] 蒙峻[1] 张喜平[1] 胡振军[1] 侯生军[1] 

机构地区：[1]中国科学院近代物理研究所

出　　处：《真空》2006年第3期51-54,共4页Vacuum

摘　　要：分别对测试系统本底及经两种方法处理的M n-Zn铁氧体样品进行了测试,分析其主要的出气成分,计算出处理后的样品材料出气率。通过测试与分析,得出了对置于超高真空环境内的M n-Zn铁氧体材料表面的保护和清洁方法。Tests were carried out separately for the background pressure of experimental setup and two Mn-Zn ferrite specimens which have been treated by different cleaning processes. The main residual gases in the test results were analyzed and the out-gassing rate of the two specimens were calculated. The protection/cleaning processe was thus proposed for the Mn-Zn ferrite surfaces to put into an ultra-high vacuum system.

关 键 词：超高真空 MN-ZN铁氧体 出气率 质谱分析 

分 类 号：TL503.7[核科学技术—核技术及应用] TB753.3[一般工业技术—真空技术]