激光调阻中切槽质量与影响因素的关联定位分析  

Analysis of the basic causes related with the quality of notch in the laser trimming system

作　　者：孙继凤[1] 满海锋[2] 汤建华[1] 刘立峰[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]东北师范大学,吉林长春130024

出　　处：《激光杂志》2006年第3期15-17,共3页Laser Journal

摘　　要：在激光调阻中,切槽质量的评价主要包括清晰度、光滑度、平直度、垂直度和一致性等方面的内容,它们直接决定了生产片阻的品质与等级。为了得到优质切槽,掌握切槽质量与影响因素之间的关系,文章从两个角度进行分析。一是在复杂的光、机、电和计算机一体化的设备中,分析影响切槽质量的几个主要因素;二是重点分析并确定切槽质量与相关因素的对应关系。根据这些分析就可以在切槽质量发生不良时定性地得到原因并采取正确措施,无论是对调阻技术的改进还是在片阻生产中都具有重要的指导意义。In the laser trimming resistor, the etching notch＇ s quality mainly includes 5 aspects. They are clear, smooth, straight, vertical and uniform. These criterions directly affect the quality and the grade of chip resistor. In order to get good notch, it is very important to grasp the pertinence between the quality of notch and influonee causes. The paper describes the problem from two sides. One is to analysis the main factors that affect the quality of notch in this complex device. The other is to put the emphasis on the anal）sis of the corresponding relation between the quality of noah and relative factors. By these analysis results, we can find causes and adopt the fight method to resolve it when the notch is not satisfied to the requirement, It is significative to the improvement of laser trimming technology and the production of chip resistor.

关 键 词：激光调阻 切槽质量 因素分析 

分 类 号：TN248.1[电子电信—物理电子学]