单晶炉机械传动系统综述  

Review of the Mechanical Transmission System of the Single Crystal Growth Furnace

作　　者：高利强[1] 

机构地区：[1]西安理工大学,陕西西安710048

出　　处：《机械传动》2005年第6期75-78,共4页Journal of Mechanical Transmission

摘　　要：机械传动系统是单晶炉的重要组成部分,它主要包括坩埚升降与旋转系统、籽晶升降与旋转系统等等。本文详细论述了这两种传动系统的典型方案及其传动机理,最后阐明各单晶体生长方法所要求的传动系统。The mechanical transmission technology of the single crystal growth furnace is introdced.the transmission mechanisms of the representative transmission projects and the electromechanical integration technique are discussed in detail,then the required transmission systems of various single crystal growth methods are clarified.

关 键 词：单晶炉 机械传动 升降与旋转 

分 类 号：TH132[机械工程—机械制造及自动化] TF806.9[冶金工程—有色金属冶金]