压电叠层作动器机电性能实验分析  

Experimental Research on Electro-mechanical Characterization of Piezoelectric Stack Actuator

作　　者：郑凯[1] 阎绍泽[2] 温诗铸[2] 

机构地区：[1]北京科技大学机械工程学院,北京100083 [2]清华大学精密仪器与机械学系,北京100084

出　　处：《压电与声光》2006年第3期373-376,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(59905016)

摘　　要：对压电叠层作动器的机电性能进行了实验测试与分析。主要测量了重复精度、稳定性、不同负载的位移输出、迟滞度、刚度特性等参数,为确定作动器在主动杆中的最优预载荷等提供参考数据。实验结果证实了作动器的重复精度为±0.5μm,最大漂移量为0.1μm,机电特性与外加负载有很大关系:一定压应力下的压电作动器输出位移增大,位移输出迟滞度会有一定程度的改善;弹性模量随应力和驱动电压的增大而逐渐增大,但电压升至一定程度时将基本趋于稳定。Experiments were conducted and analyzed to investigate the electro-mechanical characterization of the piezoelectric stack actuator. Some parameters were evaluated including repeatability accuracy, stability, output displacement under different compress stress, hysteresis degree and stiffness under various driven voltage. These parameters were necessary to determine the optimized condition of the piezoelectric stack actuator in the control applications. The experiment results showed that the repeatbility was about ±0.5μm,and the bsolute positioning accuracy was about 0.1μm. The experiment results indicated strong dependence between the electro-mechanical characterization of the piezoelectric stack actuator and mechanical preload and applied voltage. The output displacement was found to increase under certain compressive prestress, and the hysteresis shows better performance. Stiffness increase with the increased of compress stress and driven voltage, and became stable when the driven voltage up to some degree.

关 键 词：压电叠层作动器 稳定性 位移 迟滞 刚度 

分 类 号：TB381[一般工业技术—材料科学与工程]