离子束溅射沉积不同厚度铜膜的光学常数研究  

Optical Constants of Ion Beam Sputtering Deposited Copper Films of Different Thickness

作　　者：范平[1] 邵建达[2] 易葵[2] 齐红基[2] 范正修[2] 

机构地区：[1]深圳大学理学院,深圳518060 [2]中国科学院上海光学精密机械研究所,上海201800

出　　处：《光学学报》2006年第6期943-947,共5页Acta Optica Sinica

基　　金：国家863计划(2004AA847060);深圳市科技计划(200319)资助课题

摘　　要：利用Lambda-900分光光度计对离子束溅射沉积不同厚度Cu膜测定的反射率和透射率,运用哈德雷方程,并考虑基片后表面的影响,对离子束溅射沉积的Cu膜光学常数进行了计算。结果表明,在同一波长情况下,膜厚小于100 nm的纳米Cu膜光学常数随膜厚变化明显;膜厚大于100 nm后,Cu膜的光学常数趋于一定值。Cu膜不连续时的光学常数与连续膜时的光学常数随波长变化规律不同;不同厚度的连续膜的光学常数随波长变化规律相同,但大小随膜厚变化而变化。The reflectivity and transmittance of ion beam sputtering deposited Cu films of different thickness have been measured by Lambda-900 spectrophotometer. Using Hadley equations, taking into account the correction due to the back surface of the substrate, the optical constants of ion beam sputtering deposited Cu films have been calculated. The results show that the optical constants of Cu films for the same wavelength change evidently along with thickness if the film thickness is less than 100 nm, but reach a certain value if the film thickness is bigger than 100 nm. The relationship between the optical constants of discontinuous Cu films and the wavelength is different from that of continuous Cu films. The relationship between the optical constants of continuous Cu films of different thickness and the wavelength is similar, but the values of the optical constants are different.

关 键 词：薄膜光学 光学常数 铜膜 离子束溅射 

分 类 号：O484.4[理学—固体物理]