扭臂结构静电驱动式微驱动器动力学特性分析  

Characteristic Analysis on Dynamic Response of a Micro-actuator with Torsion Beam Using Electrostatic Actuation

作　　者：孙东明[1] 董玮[1] 玄伟[1] 刘彩霞[1] 王国东[1] 陈维友[1] 

机构地区：[1]吉林大学集成光电子学国家重点实验室吉林大学实验区,吉林长春130012

出　　处：《光电子．激光》2006年第6期658-665,共8页Journal of Optoelectronics·Laser

基　　金：国家"863"计划资助项目(2002AA312023);吉林大学研究生创新基金资助项目

摘　　要：基于扭转动力学原理,推导了用于分析静电微驱动器的驱动电压、响应时间和其它动力学参数的特性方程。对于忽略和考虑空气阻尼效应的2种情况,分别进行了详细的讨论,计算结果可以用于分析器件处于真空和空气条件下的工作状态。结果表明,当考虑空气阻尼时,悬臂梁的运动轨迹与忽略空气阻尼时相比较发生相当大的改变,从而吸合(pull-in)电压和响应时间等计算结果也发生改变。因此,对于微机电系统(MEMS)器件的设计和制作,空气阻尼效应是影响其性能和工作条件的重要因素。最后,介绍了一种光学测量方法,可用于器件的响应时间和悬臂梁扭转角度等参数的测试,得到的实验结果与理论分析结果有较好的吻合。Based on torsional dynamic theory, appropriate equations are developed that gain insight into the actuating voltage,switching time and other dynamic parameters for a micro-mirror using electrostatic actuation, The analytical results are discussed in detail without and with considering air squeeze film damping, respectively. It is equivalent to assume that the mirror is operated in vacuum or at ambient pressure. When the effect of the damping is considered, the movement trajectory of the cantilever beam is changed, and the calculated results of the pull-in voltage and switching time are considerably different compared with those without considering damping. Therefore, the effect of the air squeeze film damping is an important factor in the design and fabrication of micro-electro-mechanical systems（MEMS）. Finally,an optical technique is described for the measurement of the deflection angle and switching time of the device. The experimental results are in agreement with the theoretical analysis.

关 键 词：微机电系统(MEMS) 微驱动器 静电驱动 动力学分析 空气压膜阻尼 

分 类 号：TP211.4[自动化与计算机技术—检测技术与自动化装置]