一种新的Mems变形反射镜主要性能参数测试  

Characteristics measurement for a novel MEMS deformable mirror

作　　者：刘喜斌[1] 余洪斌[2] 方迪[2] 

机构地区：[1]湖南理工学院物电系,湖南岳阳414006 [2]华中科技大学光电子工程系,湖北武汉430074

出　　处：《湖南理工学院学报（自然科学版）》2006年第2期41-44,共4页Journal of Hunan Institute of Science and Technology(Natural Sciences)

基　　金：湖南省教育厅科研资助项目(05C602)

摘　　要：通过对37单元Mems变形镜面形的测量得到了变形镜的电压-位移静态曲线。通过对自适应光学微变形反射镜理论研究推导和实验测试,导出了变形反射镜光学影响函数的矩阵并由此得到电压控制矩阵,从而利用控制电压校正了变形镜的初始面形,为系统波前畸变校正提供了与理论相一致的实验依据。对变形镜校正能力进行了测评,为今后全面优化设计微变形反射镜及其更完美的适应自适应光学系统的需要提供了实验数据与理论支持。The static deformation function as the applied voltage was measured for the MEMS deformable mirror with 37-cha nnel actuators. The optical influence function matrix of mirror was also obtained through the theoretical analysis and experiment m easurement. As a result, the initial mirror deformation could be corrected by applying corresponding control voltages to mirror, thus providing an experimental guidance for the wavefront aberration correction. Finally, the correction ability of mirror was also tested for the further design optimization for mirror and adaptive optical system.

关 键 词：Mems变形反射镜 静态响应曲线 影响函数 

分 类 号：TN201[电子电信—物理电子学]