TiB_2和Ti-B-N涂层的性能对比研究  

Comparison of Properties of TiB_2 coatings and Ti-B-N coatings

作　　者：孙荣幸[1] 张同俊[1] 戴伟[1] 李松[1] 

机构地区：[1]华中科技大学模具技术国家重点实验室,武汉430074

出　　处：《材料工程》2006年第4期41-43,共3页Journal of Materials Engineering

基　　金：东莞市科研发展专项资助基金(2003D1011)

摘　　要：用磁控溅射法在1Cr18Ni9Ti不锈钢上沉积了TiB2和Ti-B-N涂层。用场发射电子扫描显微镜(FESEM)和小掠射角X射线衍射(GAXRD)研究了涂层的结构与形貌,并对涂层的显微硬度进行了检测分析。研究表明:通入N2后,Ti-B-N涂层变得更为光滑平整,涂层结构由纳米柱状晶转为非晶结构,显微硬度降低。在室温无润滑条件下,检测了涂层的耐磨性能,结果表明Ti-B-N涂层的摩擦系数低于TiB2涂层,但涂层的耐磨性并没有得到提高。TiB2 and Ti-B-N coatings were prepared by magnetron sputtering on 1Cr18Ni9Ti stainless steel. The microstructure and morphology of the TiB2, Ti-B-N coatings were investigated by field emission scanning electron microscopy （FESEM） and glancing angle X-ray diffraction （GAXRD）. The microhardness of the films was tested and analyzed. The results showed that,when nitrogen was introduced, the surface of Ti-B-N coatings became very smooth, the structure of the coatings transformed from columnar nanostructure into amorphous state. The micro-hardness of Ti-B-N coatings decreased. Sliding friction and wear investigation were also performed at room temperature without lubrication. It is found that the friction coefficient of the Ti-B-N coatings is lower than that of the TiB2 coatings, but the wear resistance doesn＇t show improvement.

关 键 词：磁控溅射 TIB2涂层 Ti-B-N涂层 显微硬度 耐磨性 

分 类 号：TG174.44[金属学及工艺—金属表面处理]