精密隔振平台主动阻尼系统的低频微振动测量研究  

Research on Measurement of Low-frequency and Weak Vibration for Active Damping of Optical Platform

作　　者：何建忠[1] 

机构地区：[1]上海理工大学计算机工程学院,上海200093

出　　处：《仪器仪表学报》2006年第6期583-587,共5页Chinese Journal of Scientific Instrument

摘　　要：阐述了精密气垫式隔振平台的主动阻尼关键技术之一的低频微振动测量问题,着重分析了压电传感器在低频、微幅振动测量的条件下的电荷变换单元的电路参数,并介绍了实际研究结果及其在上述主动阻尼系统中的使用效果。It introduced the measurement of low-frequency and weak vibration in active damping of pneumatic isolation platform, and mainly studied the requirement for piezoelectric sensor charge-voltage converter under the conditions of low-frequency and weak vibration and offered a set of the circuit parameters. The result and its application are also showed.

关 键 词：隔振平台 主动阻尼 压电传感器 电荷变换 

分 类 号：O328[理学—一般力学与力学基础]