一种微透镜阵列制作方法  

A novel method of fabricating microlens arrays

作　　者：张鸿海[1] 范细秋[1] 胡晓峰[1] 刘胜[1] 

机构地区：[1]华中科技大学机械科学与工程学院,湖北武汉430074

出　　处：《华中科技大学学报（自然科学版）》2006年第6期77-79,共3页Journal of Huazhong University of Science and Technology(Natural Science Edition)

基　　金：国家自然科学基金资助项目(50475137);高等学校博士学科点专项科研基金资助项目(2004487026).

摘　　要：提出一种采用热压印技术制作微透镜阵列的方法.将聚合物加热到其玻璃转化温度以上,利用预先制备好的模板在适当的压力下压向聚合物样品,保持压力直到聚合物温度降到玻璃转化温度以下,将模板移去后,模板上图形便转移到样品表面.根据热压印工艺要求,研制了一台热压印设备,并利用这台设备制作了单元口径大小为40μm,单元之间间距为60μm的256×256单元8位相台阶衍射微透镜阵列.制作的微透镜阵列SEM图表明图形台阶清晰、各单元一致性好.光学性能测试表明制作的微透镜阵列聚焦的三维光强分布集中,具有较高的峰值.从制作工艺可以看出,利用热压印的方法制作微透镜阵列工艺简单,对制作设备要求不高,为实现低成本、高分辨率、大批量制造微透镜阵列等器件创造了条件.A method of fabricating microlens arrays by hot embossing was introduced. A stumper with required structures is pressed into the surface of polymeric foil and heated to a temperature above its glass transition temperature under suitable pressure until the temperature droped below the glass transition temperature of the polymer, followed by removal of the stumper and left the structures of the stamper in the polymeric foil. To meet the requirements of fabrication microlens arrays by hot embossing, a prototype tool was developed, by which a 8-phase-level 256×256 elements diffractive microlens array with element dimension of 40μm×60μm was fabricated. The embossed microlens array has excellent definition and fine uniformity in its scanning electron micrography（SEM） picture. Optical performance test result shows that the 3-D light intensity distribution is concentrated with a high peak value. Without sophisticated facilities, microlens arrays can be fabricated by using the embossing process with low-cost, high resolution and high-throughput.

关 键 词：微透镜阵列 热压印 聚甲基丙烯酸甲脂 衍射 

分 类 号：TH741.8[机械工程—光学工程]