Characterization and Modeling of Finite-Ground Coplanar Waveguides in 0.13μm CMOS  

0.13μmCMOS上接地板宽度有限共面波导的特性与建模(英文)

作　　者：陈勖[1] 王志功[1] 

机构地区：[1]东南大学射频与光电集成电路研究所,南京210096

出　　处：《Journal of Semiconductors》2006年第6期982-987,共6页半导体学报（英文版）

基　　金：台湾地区TSMC公司器件建模资助项目~~

摘　　要：We discuss the characterization and modeling of coplanar waveguides （CPW） realized in TSMC 0. 13μm CMOS process. EM-field simulations with momentum are performed to estimate the important parameters of the transmission lines, such as characteristic impedance and propagation loss. Coplanar waveguide libraries are designed with Z values of 30,50,70, and 100Ω. Finally, the propagation constant and the characteristic impedance are measured in a frequency range from 0. 1 to 40GHz with a vector-network analyzer,using the short-open-loadthru （SOLT） de-embedding technique. The distributed parameters of the CPWs are extracted from the measured S-parameters.讨论了利用TSMC0.13μmCMOS工艺实现的共面波导的特性及其建模.通过Momentum等电磁场仿真软件计算了传输线的基本参数,例如特征阻抗和衰减常数.并设计了特征阻抗分别为30,50,70和100Ω的共面波导传输线元件库.最后,在0.1～40GHz的范围内利用网络分析仪和SOLT(short open load thru)测试技术测得特征阻抗和衰减常数,共面波导的分布参数则通过提取测试得到的S参数得到.

关 键 词：coplanar waveguide CMOS S-PARAMETER 

分 类 号：TN814[电子电信—信息与通信工程]