集成电路芯片生产的环境保护  

Environmental Protection of IC Chip Production

作　　者：聂菲[1] 张卿川[2] 王辉民[3] 

机构地区：[1]北京科技大学,北京100024 [2]信息产业电子第十一设计研究院,成都610021 [3]国家环境保护总局环境工程评估中心,北京100012

出　　处：《环境保护科学》2006年第3期22-24,27,共4页Environmental Protection Science

摘　　要：集成电路产业对国民经济的发展起着“倍增器”的作用,集成电路芯片的加工生产工艺流程比较复杂,污染因子多,环境问题突出。笔者详细分析了典型芯片制造厂污染物的产生及应采取的环保治理措施,对于芯片生产排放的半导体特殊气体,目前我国尚无排放标准,提出了参照执行技术引进国的有关标准。IC chip industry plays an important role in the national economy. Its manufacture process is complex and results in many pollutants and serious environmental problems. The authors analyze the production and relative treatment measures of the pollutants in the typical IC chip manufacture, and suggest to consult the standard from the technology introducing country because of no emission standard for special gases during the IC chip production in China.

关 键 词：集成电路 环境影响 对策措施 

分 类 号：X322[环境科学与工程—环境工程]