基于图像处理的微装配自动调焦系统  

Micro-assembly auto-focusing system based on image processing

作　　者：段瑞玲[1] 段惠波[1] 李庆祥[1] 李玉和[1] 杨再华[1] 

机构地区：[1]清华大学精密仪器及机械学系,北京100084

出　　处：《光学精密工程》2006年第3期468-472,共5页Optics and Precision Engineering

基　　金：973国家重点基础研究发展计划"高性能电子产品设计制造精微化;数字化新原理和新方法"的子课题"超精表面制造和改性中的纳米粒子行为与分子迁移机制"(No.2003CB716201)

摘　　要：介绍了一个基于图像处理的自动调焦系统,该系统由光学显微镜、CCD、力矩电机和齿轮传动机构等组成。调焦系统中采用粗/精结合的调焦方法,即首先采用基于Krisch边缘检测算子的清晰度评价函数对被测物体进行粗调焦,并在计算机上采集了包含目标的大致轮廓和边缘的显微图像;然后针对全景图像上的某个目标区域采用基于高频分量的清晰度评价函数进行精调焦,使得显微图像显示出更多的纹理细节。实验中清晰度评价函数算法均采用Windows下的Visual C++实现。实验结果表明,该自动调焦的系统精度可达±4.8μm,基本上满足了微装配任务的调焦精度要求。Based on the image processing technology,an auto-focusing system consisted of optical microscope, CCD, moment motor and drive gear etc,was presented. In combination of coarse with fine adjustment method,this system applied Krisch-image edge gradient operator to evaluate the entire microscopic image of the micro-object for its coarse focus position, the system also used the sharpness function based on high frequency component to evaluate the certain domain of the microscopic image for fine adjustment. The sharpness functions used in the experiment were programmed with Visual C＋＋, and the experimental results show that the position accuracy, of auto-focusing system is less than ±4.8 μm, which satisfies the focusing requirement of the micro-assembly.

关 键 词：微装配 自动调焦 图像平滑 清晰度评价函数 

分 类 号：TH742.9[机械工程—光学工程]