磁控溅射HA(+YSZ)/Ti6Al4V复合涂层的微观形貌和生长方式  

The Surface Morphology and Growth Pattern of the HA(+YSZ)/Ti6Al4V Composite Coatings Fabricated by RF Magnetron Sputtering

作　　者：施秋萍[1] 赵玉涛[1] 戴起勋[1] 林东洋 罗平辉[1] 

机构地区：[1]江苏大学材料科学与工程学院,镇江212013

出　　处：《材料导报》2006年第F05期264-267,共4页Materials Reports

基　　金：江苏省自然科学基金项目资助(BK2003051)

摘　　要：采用磁控溅射方法在钛合金(Ti6A14V)基体上制备了HA(+YSZ)复合涂层。利用X射线衍射仪(XRD)分析涂层的物相组成,扫描电镜(SEM)观察涂层的表面形貌,原子力显微镜(AFM)分析涂层的生长状况,划痕法测定涂层与基体的附着力。结果表明,用磁控溅射法可在Ti6Al4V基体上制备HA(+YSZ)复合涂层,涂层组成与靶材基本相似,涂层呈多孔状,划痕法测量涂层的附着力约为80N,涂层的生长模式为层状生长加岛状生长。Radio frequency magnetron sputtering is applied to deposit hydroxyapatite （HA（＋YSZ）） composite coating on Ti-alloy. Phases composition, surface morphology, the bonding strength of HA/YSZ composite coating are investigated by X-ray diffraction（XRD）, scanning electron microscopy（SEM）and the scratch testing. The results indicate that the HA/YSZ composite coating can be successfully deposited on Ti-alloy. The composition of the coating is similar to the target. The surface is covered with porous coating, where the tissue will grow. The bond strength is, increased with the increasing of sputtering power in a certain scope,around 80N. The growth pattern of the coating is lamellar accompany with island way.

关 键 词：复合涂层 磁控溅射 微观形貌 生长方式 

分 类 号：TQ174[化学工程—陶瓷工业]