Structural and optical properties of tellurium films obtained by chemical vapor deposition(CVD)  

Structural and optical properties of tellurium films obtained by chemical vapor deposition(CVD)

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作  者:马玉天 龚竹青 徐卫红 黄坚 

机构地区:[1]School of Metallurgical Science and Engineering, Central South University, Changsha 410083, China Jinchuan Group Ltd, Jinchang 737100, China [2]School of Metallurgical Science and Engineering, Central South University, Changsha 410083, China

出  处:《中国有色金属学会会刊:英文版》2006年第3期693-699,共7页Transactions of Nonferrous Metals Society of China

基  金:Project(50204001) supported by the National Natural Science Foundation of China

摘  要:Tellurium thin films were prepared by the chemical vapor deposition method. The structure, surface morphology and optical properties of the Te thin films were analyzed by powder X-ray diffraction, scanning electron microscopy, FTIR transmission, UV/VIS/NIR transmission and reflectance. The results show that the films structural and optical properties are influenced by many factors such as film thickness, crystallite size and substrate temperature. The films as thick as 111?133 nm have high IR transmission across the full 8?13 μm band and highly blocking in the solar spectral region elsewhere, which indicates that Te films thickness in this region can be used as good solar radiation shields in radiative cooling devices.Tellurium thin films were prepared by the chemical vapor deposition method. The structure, surface morphology and optical properties of the Te thin films were analyzed by powder X-ray diffraction, scanning electron microscopy, FTIR transmission, UV/VIS/NIR transmission and reflectance. The results show that the films structural and optical properties are influenced by many factors such as film thickness, crystallite size and substrate temperature. The films as thick as 111-133 nm have high IR transmission across the full 8-13 μm band and highly blocking in the solar spectral region elsewhere, which indicates that Te films thickness in this region can be used as good solar radiation shields in radiative cooling devices.

关 键 词:碲薄膜 化学气相淀积 太阳辐射防护 CVD 辐射冷却 光学性能 

分 类 号:TB43[一般工业技术]

 

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