多孔氧化铝薄膜横观各向同性弹性性质的研究  

Transversely Isotropic Elasticity of Porous Alumina Film

作　　者：陈健[1] 辜萍[1] 柳兆涛[1] 赵建华[1] 

机构地区：[1]中国科学技术大学力学和机械工程系中国科学院材料力学行为与设计重点实验室,合肥230027

出　　处：《实验力学》2006年第3期307-314,共8页Journal of Experimental Mechanics

基　　金：国家自然基金项目(10302026)资助

摘　　要：电化学阳极氧化生成的氧化铝薄膜含有高度有序的纳米孔阵列,本文首先假设氧化铝薄膜基体(无孔部分)为各向同性,结合其周期性孔结构特点和均匀化理论,可以得到氧化铝基体和薄膜弹性性质之间的关系。然后利用单轴拉伸结合电子散斑干涉(ESPI)的方法得到薄膜面内的杨氏模量为63.4GPa,并根据均匀化方法得到的基体与薄膜弹性性质的关系进一步推出薄膜横观各向同性的其它弹性参数,如基体杨氏模量等。为证明结果的可靠性,利用推出的弹性参数建立三维有限元模型,模拟纳米压痕实验,得到的加卸载曲线与实验曲线相吻合。Amorphous nanoporous alumina films containing parallel capillary pores were fabricated by anodically oxidizing high purity aluminum films in oxalic acid solutions. In this article, the relationship of the elastic properties for alumina matrix and alumina films was deduced based with the assumption of the isotropic alumina matrix （part without pores） and combining the theory of homogenization. Uniaxial tensile tests with Electronic Speckle Pattern Interferometry （ESPI） were performed to obtain in-plane Young＇s modulus of alumina film. The obtained value is 63. 4GPa. According to the relationship between alumina matrix and porous film from the homogenization method, the other elastic parameters of transversely isotropy of porous film can be deduced, such as the elastic modulus of the matrix part, etc. To approve the validity of the results, the 3D FEA simulation of loading-unloading curves of nanoindentation test were compared with the partial unloading-loading nanoindentation experiments. The results from simulations and experiments are consistent very well.

关 键 词：多孔氧化铝薄膜 单轴拉伸 电子散斑干涉 均匀化理论 纳米压痕 有限元 

分 类 号：TB301[一般工业技术—材料科学与工程]