恒压式气体微流量计测量不确定度评估  

Uncertainty Evaluation of Constant Pressure Gas Microflowmeter

作　　者：冯焱[1] 成永军[1] 张涤新[1] 

机构地区：[1]兰州物理研究所,甘肃兰州730000

出　　处：《计测技术》2006年第3期46-48,共3页Metrology & Measurement Technology

摘　　要：介绍了恒压式气体微流量计的组成和校准原理。在对电容薄膜规做了热流逸效应实验的基础上,对流量计的测量不确定度进行了评估,给出了扩展不确定度和包含因子。通过传递标准漏孔与德国PTB开展了漏率比对,验证了测量不确定度评估结果的可靠性。The structure and calibration theory of a constant pressure gas micro-flowmeter are introduced. On the basis of thermal transpiration effect experiments of capacitance diaphragm gauge （CDG）, the uncertainties of constant pressure gas micro-flowmeter are strictly evaluated. And the expanded uncertainties and coverage factors are also given. Through the leak-rate comparison with PTB using standard leak, the reliability of uncertainty evaluation results has been verified.

关 键 词：恒压 气体微流量计 测量不确定度 评估 

分 类 号：TB937[一般工业技术—计量学]