红外材料硅透镜加工工艺研究  

Fabrication techniques of IR Si lenses

作　　者：徐岩[1] 李善武[1] 杨新华[1] 陈洪许[1] 

机构地区：[1]中国空空导弹研究院,河南洛阳471009

出　　处：《红外与激光工程》2006年第3期359-361,370,共4页Infrared and Laser Engineering

摘　　要：随着红外空空导弹的发展,红外光学材料单晶硅得到了广泛的应用。介绍了单晶硅材料加工透镜的工艺过程,着重研究了硅透镜的抛光技术,通过使用不同的抛光粉及抛光模层材料,找到了加工硅透镜的最佳工艺匹配条件。实验结果表明:使用SiO2胶体配制的抛光液(PH 10￣11)及用抛光布制成的抛光模,采用机械-化学方法抛光出的零件表面疵病达到III级(GB1185-74),并能够通过修改抛光模控制光圈及光圈误差,加工出的硅透镜满足导弹光学系统的要求。With the development of IR air-to-air missile, more and more IR optical materials were used, especially single-crystal silicon. In this paper, a fabrication process for the material single-crystal silicon was introduced. The polishing process was researched emphatically. Based on different polishing powders and polishing layer materials, an optimum fabrication method of Si lenses was found. The results indicate that surface imperfection is up to par B=III（GB 1185-74 ） using SiOz polishing liquid（PH10-11） and polishing layer taking advantage of mechanical -chemical polishing. Tolerances for optical power N and irregularity AN can be satisfied for the design requirements of missile optical systems.

关 键 词：单晶硅 表面疵病 精磨 机械-化学抛光 

分 类 号：TN213.05[电子电信—物理电子学]