C2H2／H2比率对铝合金上电弧离子镀类金刚石膜的结构和腐蚀性能的影响  

Influence of the C2 H2/H2 Ratio on the Structure and Corrosive Property of Diamond- like Carbon Films by Arc Ion Plating

作　　者：宋贵宏[1] 邹友生[2] 李锋[1] 陈立佳[1] 宫骏[2] 孙超[2] 

机构地区：[1]沈阳工业大学材料科学与工程学院,辽宁沈阳110023 [2]中国科学院金属研究所材料表面工程研究部,辽宁沈阳110015

出　　处：《中国材料科技与设备》2006年第4期47-50,共4页Chinese Materials Science Technology & Equipment

基　　金：辽宁省科委博士科研启动基金资助项目（20041022）

摘　　要：本文研究了在2024铝合金衬底上，环境气氛中C2H2／H2比率对电弧离子镀沉积类金刚石膜层的结构和腐蚀性能的影响。Raman谱分析表明，随着C2H2／H2比率的降低，其D峰和G峰的强度比ID／IG值增加，这意味着膜层中sp^3／sp^2键比率减少，膜层的力学性能下降；同时，G峰的峰位向高波数方向移动，峰的半高宽变窄；D峰的峰位也在向高波数方向移动变化，但峰的半高宽变化相反，逐渐宽化。膜层可以进一步提高铝合金试样的抗腐蚀能力，从自腐蚀电位看，随着C2H2／H2比率的降低，膜层试样的抗腐蚀性能略逐渐增加。In this paper, influence of the C2H2/H2 ratio on the structure and corrosive property of diamond -like carbon films which was deposited on 2024 - Al alloy substrate by arc ion plating were studied. The analysis of the Raman spectrum shows that the ratio （ID/IG） of the intensity of D peak and G peak gradually increases with decreasing the C2H2/H2 ratio in atmosphere gas. This means that sp3/sp2 bond ratio reduces with decreasing the C2 H2/H2 ratio and the mechanical properties of films deteriorate; the same time, the G peak position moves to high wave number and its half height width narrows with the decreasing the C2H2/H2 ratio in atmosphere gas. But D peak position also moves to high wave number and its half height width widens in this case. The film may further improve the corrosive resistance of sample. From the corrosive potential, the corrosive resistance of the films slightly increase with the decreasing the C2H2/H2 ratio.

关 键 词：类金刚石膜 电弧离子镀 环境气氛 RAMAN谱 

分 类 号：TG113.12[金属学及工艺—物理冶金]