有机硅化物等离子体聚合膜湿敏元件的制备  

Preparation of Moisture-Sensitive Polymer Films by Plasma Polymerization

作　　者：王世才[1] 周茂堂[1] 陈捷[1] 

机构地区：[1]中国科学院长春应用化学研究所

出　　处：《传感器技术》1990年第6期35-38,共4页Journal of Transducer Technology

摘　　要：阐述制备底片的工艺过程,研究三甲硅基二甲胺和r一氨丙基三乙氧基的等离子体聚合膜的季胺化,用IR分析湿敏材料的结构,测定了材料湿敏电阻的特性、滞后、表面能和响应时间。膜与底片粘接性好、耐较高温度和对水汽选择性很强等特点。The structure of moisture-sensitive material is analyzed by IR, and the characteristics of humidity resistance,hysteresis, surface energy and response time of the material anc tested. The film features in good adhesiveness to substrate, high temperature-resistance and high selecfivity to steam.

关 键 词：湿敏元件 聚合膜 有机硅化合物 

分 类 号：TH837[机械工程—仪器科学与技术]