圆形振动膜ZnO压电微传声器的研制  

Silicon based ZnO piezoelectric micro-microphone with circular vibrating film

作　　者：杨楚威[1] 李俊红[1] 黄歆[1] 汪承灏[1] 

机构地区：[1]中国科学院声学研究所,北京100080

出　　处：《应用声学》2006年第4期197-200,共4页Journal of Applied Acoustics

基　　金：国家自然科学基金青年科学基金项目(10204021);国家自然科学基金SOC重点基金项目(90207003)

摘　　要：本文介绍了一种新型圆形振动膜ZnO压电微传声器的制备,并对传声器制备的工艺过程进行了较为详细的描述。圆形振动膜的压电传声器与以前方形振动膜结构设计相比,较大幅度提高了传声器的灵敏度和成品率,灵敏度达到-70dB(相对于1V/Pa),成品率达到80%。This paper presents the fabrication of a silicon based ZnO piezoelectric micromicrophone with novel circular vibrating film. Micromachined techniques to fabricate the device are described in detail. The circular vibrating film structure of this microphone is a modification of the rectangular one, and the performances of the device are improved. The sensitivity is -70dB （ref. 1V/Pa） and the rate of finished product is 80%.

关 键 词：硅微传声器 圆形振动膜 压电薄膜 ZNO 

分 类 号：TN641[电子电信—电路与系统] TN304.18