一种压阻式微压力传感器  

Micro Piezoresistive Pressure Sensor

作　　者：李伟东[1] 吴学忠[1] 李圣怡[1] 

机构地区：[1]国防科技大学机电工程与自动化学院,湖南长沙410073

出　　处：《仪表技术与传感器》2006年第7期1-2,5,共3页Instrument Technique and Sensor

基　　金：国家自然科学基金资助项目(基金编号:50375154)

摘　　要：微压力传感器是微机电领域最早开始研究并且实用化的微器件之一,它结构简单、用途广。基于压阻效应、惠斯顿电桥等相关知识设计了一种压阻式微压力传感器。为增大灵敏度,设计了一种折弯形的压敏电阻。基于一些相关的微加工工艺制定了制作这种微传感器的工艺流程并且制作成功了传感芯片。设计了一个处理电路去获得此传感器的输出信号,它由两级放大电路和两级巴特沃斯低通滤波电路组成。最后利用这个测试系统检测出了随压力变化而发生变化的微电压信号。Micro pressure sensor is simple but widely used, and it is studied and industrialized very early. A piezoresistive microp ressure sensor was designed,here Piezoresistive effect and Wheatstone bridge are utilized. The snake sensitive resistance is sensitiver to pressure. Based on some related micro machining processes, a process flow is planed to fabricate make the piezoresistive sensor chip successfully. In order to get output signal, a circuit was designed,which is made up of by with two cascaded amplifiers and two cascaded Butterworth lowpass filters. The varying voltage was tested by the system as the pressure was changed. Experiment data are obtained, which also prove the feasibility of the design and the process flow.

关 键 词：微机电系统 压阻式 微传感器 测试系统 

分 类 号：TH7[机械工程—仪器科学与技术] TP212[机械工程—精密仪器及机械]