现代涡轮分子泵的技术现状与展望  

The Present Status and the Future Development of Modern Turbomolecular Pumps

作　　者：杨乃恒[1] 

机构地区：[1]东北大学

出　　处：《真空》1996年第2期1-7,共7页Vacuum

摘　　要：本文介绍了涡轮分子泵的优点及普及的原因，讨论了泵轴承系统的改善，泵的工作寿命与可靠性的提高以及宽域型复合分子泵的开发，还给出了极高真空的获得方法和泵快速抽气的措施。Abstract In this paper,the advantages of turbomolecular pumps and the causes of its popularity are introduced.We have discussed the improvement of the bearimg systems,the operating life and the reliability of the pump.The development of wide-range compound molecular pump is also studied.The methods of producing extremely high vacuum and the measures of speeding up the pumpdown of the pump are all presented in the paper.

关 键 词：真空泵 涡轮分子泵 轴承 分子真空泵 

分 类 号：TB752.27[一般工业技术—真空技术]