隧道式纳米级轮廓仪的研究  

Three Dimensional Profilers Based on the TunnelingEffect with Nanometer Scale Resolution

作　　者：李文菊[1] 张鸿海[1] 曹伟[1] 师汉民[1] 

机构地区：[1]华中理工大学,武汉喻家山华中理工大学机械科学与工程学院

出　　处：《制造技术与机床》1996年第12期15-17,共3页Manufacturing Technology & Machine Tool

基　　金：国家自然科学基金

摘　　要：介绍两种结构形式的基于电子隧道效应的纳米级三维轮廓仪。其纵向分辨率可达０．０２ｎｍ，横向分辨率可达０．２ｎｍ，扫描范围分别为４０μｍ×４０μｍ和１４μｍ×１４０μｍ。可直接对φ５０ｍｍ和φ１３０ｍｍ的大尺寸样品表面进行纳米级的超微观形貌检测与分析。文中给出了一些超精表面的超微观形貌测量的结果。This paper presents two kinds of 3-D Profilers based on the tunneling effect with nanometer scaleresolution, which have the scanning range of 40 μm×40 μm and 140 μm×140 μm respectively, both withvertical resolution of 0.02nm and horizontal resolutionabout 0. 2nm. The nanotopography of superprecisionsample sufaces with diamter of 50mm or 130mm can bedirectly measured respectively.It is easy to nanographpictures of smooth machined surface by using these twokinds of profilers.

关 键 词：纳米级 隧道效应 三维 轮廓仪 

分 类 号：TG83[金属学及工艺—公差测量技术]