反应溅射(Al,Ti)(O,N)涂层的微结构与力学性能  

Microstructure and mechanical properties of(Al,Ti)(O,N) coatings synthesized by reactive sputtering

作　　者：刘艳[1] 董云杉[1] 许辉 祝新发 李戈扬[1] 

机构地区：[1]上海交通大学金属基复合材料国家重点实验室,上海200030 [2]上海工具厂有限公司,上海200093

出　　处：《功能材料》2006年第8期1307-1309,共3页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(50571062)

摘　　要：采用Al—Ti镶嵌复合靶在Ar、N2和O2混合气体中反应溅射制备了一系列（Al，Ti）（O，N）涂层。并采用EDS、XRD、TEM和微力学探针研究了薄膜的化学成分、微结构和力学性能。结果表明，随氧分压的提高，涂层中氧含量逐步增加，氮含量相应减少，（Al＋Ti）：（O＋N）的化学计量比仍约为1：1，涂层保持与（Al，Ti）N涂层相同的NaCl结构。低氧含量时薄膜在（111）方向上择优生长，随着氧含量的提高，涂层生长的择优取向发生改变，高氧含量薄膜样品呈现强烈（200）织构的柱状晶。与此同时，（Al，Ti）（O，N）涂层的硬度和弹性模量也仍保持在与（Al，Ti）N涂层相当的35GPa和370～420GPa的高值。由于涂层中形成了相当含量的氧化物，这类涂层的抗氧化能力有望得到提高。A series of （Al, Ti）（O,N） coatings were synthesized in a gaseous mixture of Ar, N2 and O2 by reactive sputtering method using a Al-Ti mosaic target. Energy dispersive spectroscopy, X-ray diffraction, atomic force microscopy, transmission electron microscopy and nanoindentation were employed to investigate the chemical composition, microstructure and mechanical properties of these coatings. Experiment results show that with the increase of O2 partial pressure, O content in the coatings increases and N content decreases correspondingly; while the atom ratio, （Al＋Ti）/（O＋N） keeps in a stoichiometric constant of 1. These （Al,Ti）（O,N） coatings all present a NaCI structure, the same as that of （Al ,Ti）N coating. But with the increase of their O content, growing preferred orientation of coatings changes from （111） crystal plane to （200） crystal plane, and a typical columnar crystal structure is found in samples with high O content. Meanwhile, the hardness of （Al, Ti）（O, N） coatings still remains in the level of about 35GPa, close to that of the base material, （Al,Ti）N coating. Oxidation resistance of this kind of coating is expected to be improved because a certain quantity of oxides exist in the coating.

关 键 词：反应溅射 (Al Ti)(O N)复合涂层 微结构 力学性能 

分 类 号：O484[理学—固体物理]