CVD金刚石的形核和生长  

NUCLEATION AND GROWTH OF CVD DIAMOND

作　　者：黄元盛[1] 邱万奇[2] 罗承萍[2] 陈灵[2] 

机构地区：[1]韶关学院机电系,韶关512005 [2]华南理工大学机械工程学院,广州510640

出　　处：《理化检验（物理分册）》2006年第8期382-385,共4页Physical Testing and Chemical Analysis(Part A:Physical Testing)

基　　金：广东省自然科学基金项目(013004;04300026);韶关市科技计划项目(2004-14)

摘　　要：应用自制的热解丝CVD装置,研究了在金刚石沉积过程中改变甲烷浓度对其形核和生长的影响。结果表明,金刚石形核后,增加甲烷浓度,仍然可以在硅基底表面继续形成新的晶核。但是甲烷浓度由0.6%逐渐增加到1.2%时,所得最终形核密度比一开始就将甲烷浓度设为1.2%的形核密度低。新晶核比先形成的晶核具有较大的长大速度,随后所有晶核尺寸逐渐趋向相同。The nucleation and growth of diamond was investigated by changing methane concentration during diamond deposition using the self-made hot-filament CVD apparatus. The results show that after nucleation, new nucleus can form again on the silicon substrate surface when the methane concentration increases. However, the final nucleus density obtained on gradually increasing the methane concentration from 0. 6% to 1.2% is smaller than that deposited at a methane concentration of 1.2%. The growth rate of the new nuclei is larger than that of the earlier and thus all nuclei tend to have the same size.

关 键 词：化学气相沉积 金刚石 形核 

分 类 号：TB333[一般工业技术—材料科学与工程]