柔性压电式微位移机构在精密机床定位中的应用研究  

Application Research on Micro-displacement Mechanism Composed of Piezoelectric Actuator and Flexible Joint

作　　者：梁淑卿[1] 宫百香[1] 荆丹[1] 

机构地区：[1]长春工业大学机电学院,长春130012

出　　处：《长春理工大学学报（自然科学版）》2006年第2期37-40,共4页Journal of Changchun University of Science and Technology(Natural Science Edition)

基　　金：吉林省教育厅基金资助项目(200308)

摘　　要：研究、设计了一种柔性压电式微定位机构。此机构采用压电陶瓷作为微位移驱动器,柔性铰链为导向机构,对丝杠螺母传动的精密机床工作台的运动位置进行自动补偿,实现了超精密定位。文中对柔性铰链机构进行了合理的设计及参数分析,并应用于精密机床中进行定位精度测试。实测结果表明,采用柔性压电式微位移机对精密机床工作台二次精定位,可使工作台定位精度提高到0.01μm,可满足精密、超精密加工需要。A flexible micro- displacement mechanism driven by piezoelectric actuator is researched and deigned in this paper. Adopting PZT as the micro - displacement driver and a kind of flexible joint as the guiding device, it compensates moving position of ball feed machine tools automatically and realizes the second precise orientation. Reasonable design and analysis were done to flexible joint, and position accuracy test is also done for the further. Experiment result indicates that the positioning accuracy is up to 0.01um with the second precise orientation of micro -displacement mechanism, which meets the needs of super - precise manufacture.

关 键 词：压电式微定位机构 精密机床 柔性铰链 定位精度 

分 类 号：TH703.8[机械工程—仪器科学与技术]